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High-resolution electron microscopy: from imaging toward measuring

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4 Author(s)
Van Aert, S. ; Dept. of Appl. Phys., Delft Univ. of Technol., Netherlands ; den Dekker, A.J. ; van den Bos, A. ; Van Dyck, D.

High-resolution electron microscopy is discussed as a measuring, rather than an imaging, technique. It is shown that the interpretation or the images could greatly benefit from a quantitative instead of a qualitative approach accompanied by quantitative statistical experimental design.

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Instrumentation and Measurement, IEEE Transactions on  (Volume:51 ,  Issue: 4 )