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Coercivity control of RF magnetron sputtered CoCr films by external magnetic field

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4 Author(s)
Uchiyama, Y. ; Digital Equipment Corp., Yokohama, Japan ; Sato, H. ; Kitamoto, Y. ; Hwang, U.

CoCr films were prepared on glass substrates with uniform magnetic fields applied perpendicular to the substrate surface. When the magnetic field was varied from 0 to 96 Oe, the perpendicular coercivity of 20 at.% CrCo films made at an Ar pressure of 1.5 mtorr increased from about 100 to 850 Oe. The c-axis dispersion slightly increased by about a degree. At a magnetic field of 96 Oe, a lower Ar pressure of 1 mtorr resulted in a higher coercivity of 1000 Oe. X-ray analysis revealed a correlation between the coercivity and the microstrain as well as lattice coherency

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Magnetics, IEEE Transactions on  (Volume:26 ,  Issue: 5 )