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A review of thirty-five years of laser trimming with a look to the future

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1 Author(s)
Deluca, P. ; Electro Sci. Industries Inc., Portland, OR, USA

As devices and circuits become smaller and more complex, constant innovation is required from capital equipment suppliers. This is true in all of the ever-expanding applications of electronics including computers, telecommunications equipment, automobiles, and instruments. Lasers, usually focused down to micrometer-sized spots of energy, have become the fundamental tool for physically micromachining or exposing a wide variety of materials. Applications now range from printed circuit boards and hybrid circuits down to semiconductor devices. The following paper describes how computer-controlled work-cells based around the ubiquitous laser or laser systems, as they are called in the electronics industry, have changed the way all electronics products are manufactured.

Published in:
Proceedings of the IEEE  (Volume:90 ,  Issue: 10 )

Date of Publication: Oct 2002

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