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(Co35.6Fe50B14.4)-(SiO2) soft magnetic films with electrical resistivity of over 10000 μΩ · cm (1 × 10-4 Ωm) were fabricated on glass substrates by using synchronous triple-RF magnetron sputtering. The magnetic properties, high-frequency permeability characteristics, and microstructure of the films were investigated. Maximum electrical resistivity of about 115600 μΩ · cm (1.156 × 10-3 Ωm) was obtained with a large uniaxial anisotropy field Hk of about 250 Oe, a hard axis coercivity Hch of 5.6 Oe, and a saturated magnetization 4πMs of 8.3 kG. The real part of the relative permeability μ'r was about 50, which exhibited a good flat frequency dependence up to 2 GHz. The resonance frequency was higher than 3 GHz. It was found that the heteroamorphous films had soft magnetic properties with high resistivity of over 10000 μΩ · cm and high resonance frequency. The films are good candidates for core application in the gigahertz range.