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Controlling the induced anisotropy in soft magnetic films for high-frequency applications

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7 Author(s)
Chezan, A.R. ; Mater. Sci. Center, Groningen Univ., Netherlands ; Craus, C.B. ; Chechenin, N.G. ; Vystavel, T.
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Nanocrystalline soft magnetic Fe-Zr-N films were successfully deposited by dc magnetron reactive sputtering. The nitrogen content was controlled by varying the Ar/N2 ratio and/or the substrate temperature. The films have saturation magnetization and induced uniaxial anisotropy values in the range 17-21 kG and 0-30 Oe, respectively. The origin of the induced anisotropy is discussed. The films can be used as magnetic cores for inductors at gigahertz frequencies.

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Magnetics, IEEE Transactions on  (Volume:38 ,  Issue: 5 )