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Magnetic properties of Nd-Fe-B thick-film magnets prepared by laser ablation technique

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3 Author(s)
Nakano, M. ; Dept. of Electr. & Electron. Eng., Nagasaki Univ., Japan ; Tsutsumi, S. ; Fukunaga, H.

Nd-Fe-B film magnets were prepared by a laser ablation technique. The suppression of oxidation is a key point to obtain Nd-Fe-B film magnets with high coercivity. The following methods were used. 1) Ta substrates and a Ti sublimation pump as an auxiliary pump were used during deposition. 2) The composition of a target was set to Nd2.6Fe14B which included a larger amount of Nd compared with the stoichiometric composition of Nd2Fe14B. In addition, the distance between a target and a substrate was approximately 5 mm to ensure a high deposition rate. One-hour deposition using laser ablation technique enabled us to obtain Nd-Fe-B amorphous films with the thickness of approximately 50 μm. After annealing the films under an optimum condition, the coercivity and the remanence were more than 800 kA/m and approximately 0.6 T, respectively. In addition, the maximum energy product was 56 kJ/m3.

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Magnetics, IEEE Transactions on  (Volume:38 ,  Issue: 5 )