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Fabrication of magnetic dot arrays by ion beam induced chemical vapor deposition (IBICVD)

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3 Author(s)
Lapicki, Adam ; Inf. Storage Mater. Lab., Toyota Technol. Inst., Nagoya, Japan ; Kang, Kyongha ; Suzuki, T.

Cobalt dot arrays are fabricated by Ga+ ion beam induced chemical vapor deposition (IBICVD) with an objective to explore size limitations. Dots of about 100-150 nm in diameter are obtained as flat islands. Characterization by means of magnetic force microscopy (MFM) and Lorentz transmission electron microscopy (LTEM) show the deposited structures exhibiting ferromagnetic properties.

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Magnetics, IEEE Transactions on  (Volume:38 ,  Issue: 5 )