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FeTaN-IrMn exchange-coupled multilayer films have shown outstanding characteristics as soft underlayers for perpendicular media but 19 layers including the IrMn layer were required to meet the target permeability μ of ∼100 and ferromagnetic thickness of 200 nm. In order to decrease the number of layers, to improve thermal stability, and to increase the saturation flux density 4πMs, CoFe alloys with a high uniaxial anisotropy field Hk and a high 4πMs were investigated. In Co90Fe10-IrMn(10 nm) multilayer films, a significant increase in the intrinsic pinning field Hpo allowed the number of layers to be reduced from 19 to 7 with improved thermal stability. Co90Fe10-IrMn multilayer using a thinner top layer of (Co90Fe10)N combined with a Cu-IrMn underlayer showed a unique single domain direction and a low μ of 108 up to 2 GHz but a low 4πMs of 15∼16 kG. This was improved to ∼23 kG using Co35Fe65 films in which soft uniaxial anisotropic properties were achieved using a Cu underlayer. Co35Fe65-IrMn multilayer with the optimized structure of Glass-Cu(20 nm)-IrMn(10 nm)-[Co35Fe65(50 nm)-IrMn(10 nm)]4-Co35Fe65(25 nm) showed outstanding characteristics for soft underlayers.