Referenced Items are not available for this document.
A large-angle electrostatic force actuated two-axis rotational micro-mirror has been proposed and demonstrated. A built-in air gap has been introduced in between the mirror and the bottom electrode to provide sufficient space for the rotation of the mirror. As a result, a large tilt angle has been achieved without using additional actuators. The gap was produced in such a way that the grounded mirror plate and the bottom electrode were made separately in different substrates and then combined. The measured tilt angles were as large as /spl plusmn/7.5/spl deg/ and /spl plusmn/6.4/spl deg/ in the x and y direction, and the pull-in voltages for the two axes were approximately 100 V. The micro-mirror was successfully used to steer an optical beam.
Published in:
Photonics Technology Letters, IEEE
(Volume:14
,
Issue:
11
)
Date of Publication: Nov. 2002
- Page(s):
- 1569 - 1571
- ISSN :
- 1041-1135
- INSPEC Accession Number:
- 7436739
- Digital Object Identifier :
- 10.1109/LPT.2002.803913
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 10 December 2002
- Issue Date :
- Nov. 2002
- Sponsored by :
- IEEE Photonics Society
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