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Crystalline pMOS inverter using amorphous thin film transistor as active load

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3 Author(s)
Lin, H.C. ; Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan ; Sah, W.J. ; Lee, S.C.

The integration of the amorphous silicon (a-Si:H) thin film transistor on top of a crystalline p-type silicon metal-oxide-semiconductor (pMOS) transistor to serve as active load has been achieved successfully. The vertical integration of crystalline silicon and amorphous silicon circuits to form the three dimensional structure is a promising technique for future application in high density memory cells and neural network image sensors.

Published in:
Electronics Letters  (Volume:27 ,  Issue: 23 )

Date of Publication: 7 Nov. 1991

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