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Electrical and transient current characterization of edgeless Si detectors diced with different methods

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10 Author(s)
Zheng Li ; Brookhaven Nat. Lab., Upton, NY, USA ; Abreu, M. ; Eremin, V. ; Granata, V.
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High-resistivity p+/n/n+ Si pad detectors (0.25 cm2) were diced, using different dicing tools and methods, into a shape having on one edge no dead space ("edgeless detectors"). The dicing was extended into the sensitive area of the front p+ implant. Two different dicing tools were used: laser cutting and scribing. Dicing methods included cutting from the front p+ side and from the back n+ side. It was found that with no chemical or aging treatment of edges cut in this way, all the detectors (diced with different tools and methods) suffered from a very high leakage current of hundreds of μAs to mA at full depletion voltage (Vfd), as compared with a few nA before dicing, when measured the same day after dicing. All such detectors showed breakdown just at or near Vfd ∼ 80-100 V. However, after one day of room temperature aging in air, the leakage currents at Vfd improved dramatically to 1-2 μA if diced (laser cutting and scribing) from the back side. Also, there was no breakdown up to 500 V. There was little improvement over time if the sensor was diced from the front side. After at least one day of aging, detectors diced from the back side showed normal C-V and charge collection behavior. Nevertheless, the remaining leakage seems to be dominated by surface current. Chemical treatment, though, is promising for further reduction of the surface current below 1 μA at Vfd and below 10 μA at 500 V.

Published in:

Nuclear Science, IEEE Transactions on  (Volume:49 ,  Issue: 3 )

Date of Publication:

Jun 2002

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