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Fabrication of microcantilever arrays using sol-gel PZT thin film for nanopositioning

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4 Author(s)
Hong Zhu ; Sch. of Mech. & Production Eng., Nanyang Technol. Univ., Singapore ; Min Zhou ; Bangtao Chen ; Jianmin Miao

Lead zirconate titanate (PZT) piezoelectric thin films have been prepared by the sol-gel method to fabricate microcantilever arrays for nano-actuation with potential applications in hard disk drives. Film annealing temperature and time is critical to the preparation of the sol-gel thin film. The fabrication process of microcantilever arrays in planar structure is presented. Key issues for the fabrication of the cantilever are: the compatible etching process of PZT thin film, and the compensation of thin film stress in all layers to obtain a flat multiple layer structure.

Published in:

Magnetic Recording Conference, 2002. Digest of the Asia-Pacific

Date of Conference:

27-29 Aug. 2002