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A refractive free-space microoptical 4 x 4 interconnect on chip level with optical fan-out fabricated by the LIGA technique

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4 Author(s)
Voigt, S. ; Inst. for Mikrotechnik, Mainz Univ., Germany ; Kufner, S. ; Kufner, M. ; Frese, I.

A parallel purely refractive 4/spl times/4 optical data link has been built. The design is based on pairs of crossed cylindrical microlenses. The optical module is fabricated and monolithically integrated in. polymethyl methacrylate (PMMA) by the LIGA technique.

Published in:

Photonics Technology Letters, IEEE  (Volume:14 ,  Issue: 10 )