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A study on the development of a thin-film pressure sensor

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2 Author(s)
Mihara, Y. ; Mech. Eng., Musashi Inst. of Technol., Tokyo, Japan ; Someya, T.

In order to measure the oil-film pressure in engine bearings, we developed a new piezoresistive thin-film sensor made of Cu-Mn-Ni alloy with a twin-arc shape and reduced and uniform strain sensitivity. This allowed correction of the error in measured pressure due to strain using a thin-film strain sensor made of Ni-Cr-Al alloy effectively. The error in measured pressure due to temperature influence could be also reduced by optimizing the composition of the Cu-Mn-Ni alloy. Even negative pressure or tension generated in an oil-film could be measured by the new thin-film pressure sensor.

Published in:

Sensors, 2002. Proceedings of IEEE  (Volume:2 )

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