A study on the development of a thin-film pressure sensor

In order to measure the oil-film pressure in engine bearings, we developed a new piezoresistive thin-film sensor made of Cu-Mn-Ni alloy with a twin-arc shape and reduced and uniform strain sensitivity. This allowed correction of the error in measured pressure due to strain using a thin-film strain sensor made of Ni-Cr-Al alloy effectively. The error in measured pressure due to temperature influence could be also reduced by optimizing the composition of the Cu-Mn-Ni alloy. Even negative pressure or tension generated in an oil-film could be measured by the new thin-film pressure sensor.