Cart (Loading....) | Create Account
Close category search window
 

A study on the development of a thin-film pressure sensor

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Mihara, Y. ; Mech. Eng., Musashi Inst. of Technol., Tokyo, Japan ; Someya, T.

In order to measure the oil-film pressure in engine bearings, we developed a new piezoresistive thin-film sensor made of Cu-Mn-Ni alloy with a twin-arc shape and reduced and uniform strain sensitivity. This allowed correction of the error in measured pressure due to strain using a thin-film strain sensor made of Ni-Cr-Al alloy effectively. The error in measured pressure due to temperature influence could be also reduced by optimizing the composition of the Cu-Mn-Ni alloy. Even negative pressure or tension generated in an oil-film could be measured by the new thin-film pressure sensor.

Published in:

Sensors, 2002. Proceedings of IEEE  (Volume:2 )

Date of Conference:

2002

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.