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Fabrication technology for closely coupled micro coils with integrated flux guidance and their application to proximity and magnetoelastic force sensors

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2 Author(s)
Seidemann, V. ; Inst. for Microtechnology, Tech. Univ. Braunschweig, Germany ; Buettgenbach, S.

A complete process technology is introduced, allowing the integrated fabrication of micro coils in transformer configurations for micro sensors. The technology makes use of UV-depth lithography, electroplating of coil conductors and soft magnetic core structures, and SU8-dielectric for embedding and planarization. The technology's applicability is demonstrated on inductively coupled transformer sensors for distance and magnetoelastic force and torque measurements.

Published in:

Sensors, 2002. Proceedings of IEEE  (Volume:1 )

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