Fabrication technology for closely coupled micro coils with integrated flux guidance and their application to proximity and magnetoelastic force sensors

A complete process technology is introduced, allowing the integrated fabrication of micro coils in transformer configurations for micro sensors. The technology makes use of UV-depth lithography, electroplating of coil conductors and soft magnetic core structures, and SU8-dielectric for embedding and planarization. The technology's applicability is demonstrated on inductively coupled transformer sensors for distance and magnetoelastic force and torque measurements.