By Topic

Porous silicon vapor sensor with phase detection electronics

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Saha, H. ; Dept. of Electron. & Telecommun. Eng., Jadavpur Univ., Kolkata, India ; Das, J. ; Dey, S. ; Hossain, S.M.

A novel vapor sensor is presented comprising a capacitive porous silicon (PS) transducer and phase-detection electronics. Sensing of ambient vapor concentration by adsorption-diffusion-condensation kinetics of vapor molecules, by the PS layer leading to a change of its dielectric constant is modeled with an effective medium approximation (EMA). A simple but precise phase sensitive electronic circuit has been developed. This detects any change of phase of a sinusoidal signal transmitted through the PS dielectric and correlates with ambient vapor concentration. The sensor is tested in combination with the phase detection circuitry in case of relative humidity. Excellent linearity over the entire range of relative humidity is achieved. Experimental results show a resolution better than 0.1% and accuracy 2% (near the transition region) and better than 0.1% (otherwise). The response time is less than 10 sec. with good stability.

Published in:

Sensors, 2002. Proceedings of IEEE  (Volume:1 )

Date of Conference:

2002