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A low voltage, large scan angle MEMS micromirror array with hidden vertical comb-drive actuators for WDM routers

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6 Author(s)
Hah, D. ; Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA ; Huang, S. ; Nguyen, H. ; Hsin Chang
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A MEMS micromirror array with hidden vertical comb-drive actuator and springs has been successfully demonstrated. The devices were fabricated using SUMMiT-V process. The fabricated micromirror showed large optical scan angle (24°) and low actuation voltage (9 V). The fill-factor of the micromirror array was as high as 91%. Applications of the micromirror array for WDM routers are also discussed.

Published in:

Optical Fiber Communication Conference and Exhibit, 2002. OFC 2002

Date of Conference:

17-22 Mar 2002