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A novel vacuum filling process for polymeric optical waveguide fabrication has been presented in this paper. The polymeric optical waveguides fabricated by this process have successfully been obtained. Some initial tests about the polymeric waveguide have been done. The testing results indicate that the polymeric waveguide has high quality, while the process is simple, low-cost, easy to fabricate channel waveguide, good for mass production, and suitable for almost all polymers.