Cart (Loading....) | Create Account
Close category search window
 

Applications of intelligent control in improving dynamics of precision motion systems used in microelectronics manufacturing

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

1 Author(s)
Tian He ; Kulicke & Soffa Ind. Inc., Willow Grove, PA, USA

Precision motion systems play a critical role in microelectronics manufacturing by accommodating different high precision and high speed requirements in all the fabrication, inspection, assembly, and handling processes. As the precision motion systems are subjected to greater acceleration, they become more sensitive to their high-frequency resonance, which is not a concern in low speed applications. Therefore better system dynamics are necessary for successful precision motion system design. A review is presented for intelligent control techniques applied to improve the dynamics of precision motion systems and their potential extension into microelectronics manufacturing. Based on the review, utilization of intelligent control technologies is proposed to suppress adverse system dynamic behaviors while requirements on system stiffness and tolerance can be significantly relaxed. This proposed strategy appears especially meaningful and attractive, given the reality that the control electronics of precision motion systems keeps getting more capability and less expensive and the control algorithms can be optimized and tested very quickly with little cost.

Published in:

Electronics Manufacturing Technology Symposium, 2002. IEMT 2002. 27th Annual IEEE/SEMI International

Date of Conference:

2002

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.