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Submicronic thermal imaging by wavelength multiplexed photoreflectance technique

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4 Author(s)
Holé, S. ; Lab. des Instruments et Syst. d''ile de France, Univ. Pierre et Marie Curie, Paris, France ; Tessier, G. ; Filloy, C. ; Fournier, D.

High resolution temperature imaging techniques are necessary to optimise designs and detect failures of integrated circuits. An improved photoreflectance technique using simultaneous multiwavelength illumination is presented in order to probe optimally each material of integrated circuits and reduce drifts. It makes it possible to rapidly highlight hot-spots, a typical failure precursor

Published in:

Electronics Letters  (Volume:38 ,  Issue: 17 )