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A 1500 /spl mu/m/spl times/1200 /spl mu/m scanning mirror having vertical comb fingers has been fabricated by using silicon-on-insulator (SOI)-fabrication processes. It is a vertically driven electrostatic scanner and composed of two structures having vertical comb fingers. We used a buried oxide layer as an etch stop and acquired torsion bars with the uniform thickness. From this, the reliability of the scanning mirror is much improved.
Date of Conference: 20-23 Aug. 2002