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SOI-fabrication of scanning mirror for laser display

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5 Author(s)
Jin-Ho Lee ; Mater. & Devices Lab., Samsung Adv. Inst. of Technol., Suwon, South Korea ; Young-Chul Ko ; Byoung-So Choi ; Jong-Min Kim
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A 1500 /spl mu/m/spl times/1200 /spl mu/m scanning mirror having vertical comb fingers has been fabricated by using silicon-on-insulator (SOI)-fabrication processes. It is a vertically driven electrostatic scanner and composed of two structures having vertical comb fingers. We used a buried oxide layer as an etch stop and acquired torsion bars with the uniform thickness. From this, the reliability of the scanning mirror is much improved.

Published in:

Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on

Date of Conference:

20-23 Aug. 2002