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Microlenses array fabrication by hot embossing process

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4 Author(s)
Hyup Sup Lee ; Dept. of Mech. Eng., Pohang Univ. of Sci. & Technol., South Korea ; Sung-Keun Lee ; Tai Hun Kwon ; Lee, S.S.

For the mass production of microlenses array, the hot embossing process has been successfully utilized with a mold insert that is fabricated by Ni-electroplating based on a PMMA microstructure of microlenses array that is fabricated by the modified LIGA process.

Published in:

Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on

Date of Conference:

20-23 Aug. 2002