Skip to Main Content
This paper proposes a reflective type microelectromechanical system variable optical attenuator (MEMS VOA) which uses 45 degree tilted vertical movable mirror fabricated by a deep reactive ion etching (DRIE). The optical attenuation is generated by an optical axis offset controlled by the vertical mirror. Fibers are aligned passively on the vertical grooves which are formed at the same plane with the control actuator.
Date of Conference: 20-23 Aug. 2002