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Fabrication of optical MEMS in sol-gel materials

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5 Author(s)
Obi, S. ; Centre Suisse d'Electronique et de Microtechnique SA, Zurich, Switzerland ; Gale, M.T. ; Kuoni, A. ; Noell, W.
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A method for fabricating optical MEMS in sol-gel-materials is presented. The basic process involves deposition and patterning of a sacrificial spacer layer and a combined molding and photolithography step. The method described allows the fabrication of micromechanical elements incorporating micro-optical structures such as lenses (diffractive or refractive), gratings (for polarizers or resonant filters), waveguides or other micro-optical relief structures fabricated by UV-curing replication processes.

Published in:

Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on

Date of Conference:

20-23 Aug. 2002