Referenced Items are not available for this document.
An electrostatically driven tunable MEMS Fabry-Perot filter with wide wavelength range from 2.5 /spl mu/m to 4.5 /spl mu/m has been developed for NDIR CO/sub 2//H/sub 2/O gas sensors. The Fabry-Perot filter is equipped with the NDIR system, and the principle of this gas sensing method has been confirmed.
Published in:
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Date of Conference: 20-23 Aug. 2002
- Page(s):
- 27 - 28
- Print ISBN:
- 0-7803-7595-5
- INSPEC Accession Number:
- 7516326
- Conference Location :
- Lugano, Switzerland
- Digital Object Identifier :
- 10.1109/OMEMS.2002.1031427
- Product Type:
- Conference Publications
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