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Development of a low-cost 8/spl times/8 optical switch using micro hot embossing

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2 Author(s)
Shan, X.C. ; MES, Agency of Ind. Sci. & Technol., Ibaraki, Japan ; Maeda, R.

An 8/spl times/8 optical switch with a potentially low cost has been designed and fabricated. The switch device, driven by electrostatic force, was made of polymer material using hot embossing process. The optical switch was aligned and assembled together with input and output fibers via grooves etched on a silicon substrate.

Published in:

Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on

Date of Conference:

20-23 Aug. 2002