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Summary form only given. The main constituents of the odour gases such as ammonia, hydrogen sulfide, and mercaptan etc. substances and formaldehyde are given off from residential houses and industrial premises. Those odour gases are a significant problem during product processing and influence semiconductor device manufacturing yield in the clean room. Plasma chemical processes are highly effective in promoting oxidation, enhancing molecular dissociation, or producing free radicals to enhance chemical reaction, and, therefore, have many applications. Especially, the energetic electron induced plasma with adsorbent filter hybrid system is effective for decomposing VOCs. With this system one can expect that the filter will adsorb undesired discharge by-products and energy efficiency is higher than conventional plasma reactors. In this work, removal of ammonia gas from air is carried out by superimposed corona torch reactor-absorbent hybrid system experimentally. The corona touch reactor-absorbent filter hybrid system consists of multi-channel hollow electrode type corona touch, and sheet type absorbent (Pureline@ by Nippon Puretec Co., Ltd.,). Experiments are conducted for the gas flow rate are from 7 to 28 L/min., the applied voltage from 20 to 30kV and the ammonia initial concentration were varied from 5 to 10 ppm. Ammonia concentration was measured by an ammonia monitoring system (Pure Mate@, by Nippon Puretec Co.,) and the gas detection system (Gastec@, by Gastec Co. Ltd.,). The experimental results show that the removal efficiency of ammonia increases with increasing applied voltage. The effect of absorbent reactions for ammonia removal is significant enhanced with corona discharges even under the room temperature. Especially, this superimposed corona torch and absorbant filter hybrid system is not only able to treat various different kinds of VOCs without changing different type of reactors and filters, but also economically sound, since the lifetime of adsorbe- t filters becomes much longer and the power consumption of the reactor becomes optimum. Also, those results indicated that the superimposed system shows enhanced removal efficiency and also discharge regions.
Date of Conference: 26-30 May 2002