By Topic

Scanning mirror for optical coherence tomography using an electrostatic MEMS actuator

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Zara, J.M. ; Dept. of Biomed. Eng., Duke Univ., Durham, NC, USA ; Izatt, J.A. ; Divakara Rao, K. ; Yazdanfar, S.
more authors

Describes the development of a new type of optical coherence tomography (OCT) probe using an electrostatic micromachine (MEMS) actuator. These devices consist of millimeter scale mirrors resting on micron scale polyimide hinges that are tilted using a linear MEMS actuator, the integrated force array (IFA). The IFA is a parallel network of deformable capacitor cells that electrostatically contract with an applied voltage. The support structures, hinges, and actuators are fabricated from polyimide on silicon wafers using photolithography. These scanners were designed, fabricated and tested for optical displacements at different frequencies and drive voltages. They were then used in the scanning arm of an experimental OCT imaging system to make preliminary images.

Published in:

Biomedical Imaging, 2002. Proceedings. 2002 IEEE International Symposium on

Date of Conference:

2002