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Strontium lanthanum titanate-niobate (SrLaNbxTi1-xO3) thin-film resistors are fabricated on SiO2/Si substrates by an argon ion-beam sputtering technique. Measurements show that the thin-film resistor has superior sensitivity for visible light. Moreover, the effects of Nb concentration on the photo-electrical properties of Sr1-xLaxNbyTi1-yO3 thin-film resistors and frequency effects on the photosensitivity performance are extensively investigated.
Date of Conference: 2002