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XY-stage driving electron-beam mastering with nanometer-accuracy positioning for high-density optical disk

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7 Author(s)
Nishida, T. ; Central Res. Lab., Hitachi Ltd., Tokyo, Japan ; Isshiki, F. ; Suzuki, T. ; Yamaoka, M.
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Toward the goal of achieving 40-100 Gbit/in2 high-density optical recording, multilevel mark-edge recording combined with dual-track reproduction has been proposed under the name SCIPER/RPR (single-carrier independent pit-edge recording/radial-direction partial response). We have designed and developed an XY-stage driving electron beam (EB) mastering system to fabricate a high-density master disk. This time we applied the EB mastering system to the 40-Gbit/in2 SCIPER/RPR format. Then, we evaluated the format for pit-edge positioning using an optical filtering technique.

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Optical Memory and Optical Data Storage Topical Meeting, 2002. International Symposium on

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