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SEM/SThM-hybrid-system: a new tool for advanced thermal analysis of electronic devices

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5 Author(s)
Altes, A. ; Lehrstuhl fur Elektron., Bergische Univ. Wuppertal, Germany ; Joachimsthaler, I. ; Zimmermann, G. ; Heiderhoff, R.
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A resistive probe based Scanning Thermal Microscope (SThM) was implemented in an analysis chamber of a Scanning Electron Microscope (SEM). By means of this hybrid-system thermal device, specific characteristics are detectable. Variable punctual heat sources can be simulated and the influence of ambient parameters can be investigated.

Published in:
Physical and Failure Analysis of Integrated Circuits, 2002. IPFA 2002. Proceedings of the 9th International Symposium on the

Date of Conference: 2002

Page(s):
196 - 200
Print ISBN:
0-7803-7416-9
INSPEC Accession Number:
7480332
Digital Object Identifier :
10.1109/IPFA.2002.1025657

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