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SEM/SThM-hybrid-system: a new tool for advanced thermal analysis of electronic devices

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5 Author(s)
Altes, A. ; Lehrstuhl fur Elektron., Bergische Univ. Wuppertal, Germany ; Joachimsthaler, I. ; Zimmermann, G. ; Heiderhoff, R.
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A resistive probe based Scanning Thermal Microscope (SThM) was implemented in an analysis chamber of a Scanning Electron Microscope (SEM). By means of this hybrid-system thermal device, specific characteristics are detectable. Variable punctual heat sources can be simulated and the influence of ambient parameters can be investigated.

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Physical and Failure Analysis of Integrated Circuits, 2002. IPFA 2002. Proceedings of the 9th International Symposium on the

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