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Pb(Zr0.52Ti0.48)O3 film has been deposited through a novel sol-gel process on Pt/Ti/SiO2/Si and annealed in a rapid thermal processor at 650°C. The well-crystallized film is very smooth with a roughness of ∼2.0 nm. The remnant polarization Pr (∼28.5 μC/cm2) and coercive field Ec (∼39.8 kV/cm) have been derived from the P-E hysteresis loop. The films have a dielectric constant of ∼1080 and a dielectric loss of ∼0.01 at 1 kHz. A ferroelectric polarization fatigue test of the films has shown a high fatigue resistance up to 3×1010 cycles before Pr is decreased by 50%.