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A novel two-dimensional (2-D) optical-scanner device is presented. This device incorporates a highly magnetostrictive thin film with anisotropic properties, so that it can produce 2-D-actuation corresponding to bending and torsion vibrations. The magnetostrictive material is a TbFe-CoFe multilayer film, which has optimized properties for micro-actuators operating at low excitation magnetic fields. The new scanner also integrates an original 2-D piezoresistive detector realized in an easy fabrication process using integrated circuit (IC)-compatible technology. The detectors are able to selectively measure bending and torsional vibrations. This new device enables the synchronization of actuation and sensing for 2-D position control.
Date of Publication: Aug 2002