Cart (Loading....) | Create Account
Close category search window

Optimal scheduling techniques for cluster tools with process-module and transport-module residency constraints

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Rostami, S. ; Dept. of Electr. & Comput. Eng., British Columbia Univ., Vancouver, BC, Canada ; Hamidzadeh, B.

This paper discusses two scheduling techniques for dual-arm cluster tools that address both process-module and transport-module residency constraints and throughput requirements. The first technique is the extension of our previous work that only addressed process-module residency constraints. For cases with long process times, this technique can take a long time to find the solution and is not practical. Hence, we use this algorithm mainly as a benchmark for comparison. The second technique that uses a linear programming technique with use of several heuristics can find the optimal solution very efficiently. Analytical and experimental analysis of this technique shows the correctness, completeness and efficiency of this technique.

Published in:

Semiconductor Manufacturing, IEEE Transactions on  (Volume:15 ,  Issue: 3 )

Date of Publication:

Aug 2002

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.