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Is there light at the end of the road for optical lithography?

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1 Author(s)
Levinson, Harry J. ; Adv. Micro Devices Inc., Sunnyvale, CA, USA

As optical lithography nears its physical limits, this article discusses the 2001 ITRS update to the lithography roadmap and reviews the possible next-generation lithography technologies outlined in that update.

Published in:

Circuits and Devices Magazine, IEEE  (Volume:18 ,  Issue: 4 )