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GaAlAs/GaAs micromachined thermally tunable vertical cavity filter with low tuning voltage

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3 Author(s)
T. Amano ; Microsystem Res. Center, Tokyo Inst. of Technol., Yokohama, Japan ; F. Koyama ; M. Arai

A GaAlAs/GaAs micromachined thermally tunable vertical cavity filter with a low tuning voltage is proposed and its fabrication described. The integration of a thermal strain control layer and heating element enables wavelength tuning induced by heating. Wavelength tuning of 23.2 nm with a low tuning voltage of 4.7 V is demonstrated experimentally

Published in:

Electronics Letters  (Volume:38 ,  Issue: 14 )