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Photonic bands in patterned silicon-on-insulator waveguides

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7 Author(s)
M. Patrini ; INFM & Dipt. di Fisica "A. Volta", Universita degli Studi di Pavia, Italy ; M. Galli ; F. Marabelli ; M. Agio
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One- and two-dimensional photonic crystals are obtained by electron beam lithography and reactive ion etching on silicon-on-insulator waveguides. Variable-angle reflectance is measured and calculated in the 0.2-2-eV energy range, giving evidence of the quasi-guided modes of the photonic structure. Photonic bands in the one-dimensional case are determined and compare very well to those calculated with an expansion on the basis of the waveguide modes

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IEEE Journal of Quantum Electronics  (Volume:38 ,  Issue: 7 )