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High finesse vertically coupled waveguide-microring resonators based on Si3N4-SiO2 technology

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5 Author(s)
Tan, F.S. ; Fac. of Appl. Phys. & Electr. Eng., Twente Univ., Enschede, Netherlands ; Klunder, D.J.W. ; Kelderman, H. ; Hoekstra, H.J.W.M.
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A simple waveguiding structure with vertically coupled microring resonators has been realized. A finesse of more than 100 could be achieved by using Si3N4-SiO2 technology. The devices have been realized by means of standard optical lithography processes and reactive ion etching (RIE).

Published in:
Fibre and Optical Passive Components, 2002. Proceedings of 2002 IEEE/LEOS Workshop on

Date of Conference: 2002

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