A simple waveguiding structure with vertically coupled microring resonators has been realized. A finesse of more than 100 could be achieved by using Si3N4-SiO2 technology. The devices have been realized by means of standard optical lithography processes and reactive ion etching (RIE).
Published in:
Fibre and Optical Passive Components, 2002. Proceedings of 2002 IEEE/LEOS Workshop on
Date of Conference: 2002