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Performance of silicon micromachined waveguide at W-band

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3 Author(s)
Becker, J.P. ; Dept. of Electr. & Comput. Eng., Montana State Univ., Bozeman, MT, USA ; East, J.R. ; Katehi, L.P.B.

Fabrication and measurement of low-loss micromachined waveguides developed in (001) silicon through wet anisotropic etching is detailed. Such waveguides are candidates for use in submillimetre-wave systems owing to their compatibility with both efficient micromachined horn antenna elements and planar-based circuitry

Published in:

Electronics Letters  (Volume:38 ,  Issue: 13 )

Date of Publication:

20 Jun 2002

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