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Optical waveguides with embedded air-gap cladding integrated within a sea-of-leads (SoL) wafer-level package

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14 Author(s)
A. Mule ; Georgia Inst. of Technol., Atlanta, GA, USA ; M. Bakir ; J. Jayachandran ; R. Villalaz
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Optical waveguides are integrated into a Sea-of-Leads (SoL) wafer-level package. A photosensitive polycarbonate composite is incorporated to provide a buried air-gap cladding that allows a refractive index contrast, /spl Delta/n, between waveguide core and cladding regions of /spl Delta/n = 0.52. The final package contains 1000 electrical input/output (I/O) interconnects and 32 large-area optical waveguides for electrical chip-to-chip and optical intra-chip clock or data interconnection, respectively. Monolithic fabrication of passive optical interconnect components is described.

Published in:

Interconnect Technology Conference, 2002. Proceedings of the IEEE 2002 International

Date of Conference:

5-5 June 2002