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Sensitivity analysis of calibration standards for fixed probe spacing on-wafer calibration techniques [vector network analyzers]

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2 Author(s)
Safwat, A.M.E. ; Cascade Microtech Inc., Beaverton, OR, USA ; Hayden, L.

In vector network analyzer calibration, it is clear that the uncertainty in the standard definition leads to inaccurate measurement. We investigate the sensitivity of different on-wafer calibration techniques to probe positioning. Calibration comparison derived error-bounds are calculated for various cases differing only by a single change in probe/standard overlap.

Published in:

Microwave Symposium Digest, 2002 IEEE MTT-S International  (Volume:3 )

Date of Conference:

2-7 June 2002