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Characterization and modeling of on-chip inductor substrate coupling effect

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5 Author(s)
Chuan-Jane Chao ; Inst. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan ; Shyh-Chyi Wong ; Chia-Jen Hsu ; Ming-Jer Chen
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The substrate coupling effects of two adjacent coplanar spiral inductors are characterized and modeled. The noise magnitude between two 45 /spl mu/m-away inductors can be reduced by 6.83 dB by using guard-ring surrounding each inductor, and improved by 10.28 dB further by adding patterned ground polysilicon shield beneath at 3 GHz. The inductor with patterned polysilicon shield beneath shows improved quality factor and noise isolation. Moreover, a macro model is presented for modeling quality factor and inductance of on-chip spiral inductor and associated neighboring inductor's coupling noise effect.

Published in:
Radio Frequency Integrated Circuits (RFIC) Symposium, 2002 IEEE

Date of Conference: 3-4 June 2002

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