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Voltage and pull-in time in current drive of electrostatic actuators

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3 Author(s)
J. Pons-Nin ; E.T.S.E. de Telecomunicacio, Univ. Politecnica de Catalunya, Barcelona, Spain ; A. Rodriguez ; L. M. Castaner

The absolute maximum value of the voltage developed across an electrostatic actuator when driven by a current source has been calculated as well as an absolute minimum for the pull-in time. These two results are calculated for a drive using a δ-pulse of current and numerical assessment is given to show that for a nonzero parasitic capacitance, a realistic shape of the current pulse, or a finite value of the damping coefficient do not increase the maximum value of the voltage developed beyond that limit and that the pull-in time is always larger than the analytical minimum. A scaled-up macromodel of an electrostatic actuator has been used to register voltage transients to validate the theoretical predictions

Published in:

Journal of Microelectromechanical Systems  (Volume:11 ,  Issue: 3 )