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Modeling of the electron motion in a capacitively coupled magnetic null plasma

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6 Author(s)
Youl-Moon Sung ; Dept. of Electr. & Electron. Eng., Miyazaki Univ., Japan ; Okraku-Yirenkyi, Yaw ; Otsubo, M. ; Honda, Chikahisa
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A new type of plasma system based on the neutral loop discharge (NLD) concept is being developed for research aimed at sputtering application. This system is characterized by plasma production around the multinull magnetic field on the target surface, where a capacitive RF electric field is applied. From the results of the electron motion modeling in this system, we found that electrons around the magnetic null region on the target surface moved in meandering orbits like in the original NLD concept. Initial modeling results on electron behavior and a photograph of plasma emission taken from the new NLD system are presented

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Plasma Science, IEEE Transactions on  (Volume:30 ,  Issue: 1 )