Three-dimensional fields and temperatures in a squat helicon reactor

Magnetically enhanced inductively coupled plasmas (MEICP) and helicons have complex plasma electric-field coupling between the electric field and the plasma due to the tensor conductivity and multiple-dimensional antenna segments. Computed three-dimensional electric fields and electron temperatures are presented for a helicon reactor demonstrating azimuthal asymmetries and rotations of the electric field. The electron temperature peaks near the axial antenna segments upstream and aligns with the azimuthal electric field downstream.