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Plasma parameters of diffusion-controlled microwave discharges in surface-wave fields

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2 Author(s)
Makasheva, K. ; Fac. of Phys., Sofia Univ., Bulgaria ; Shivarova, A.

Results from diagnostics of diffusion-controlled stationary gas discharges maintained in the field of propagating surface waves are presented in this study. The set of the plasma parameters obtained includes: 1) the plasma density n¯, averaged over the discharge cross section; and its axial profile n¯(z);. 2) the electron-neutral elastic collision frequency ν; 3) the parameter μ, which describes the radial profile of the plasma density; 4) the parameter Θ, the power absorbed on average by an electron, and its axial variation Θ (z); 5) the electron temperature Te (z); and 6) the gas temperature Tg. The mechanisms of electron heating and discharge self-consistency are discussed

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Plasma Science, IEEE Transactions on  (Volume:30 ,  Issue: 1 )