Referenced Items are not available for this document.
Significant differences between microsensors and micromechanisms, on the one hand, and integrated circuits, on the other, are examined from the design viewpoint. Microelectronic sensors, micromachining processes, and micromechanisms and micro-actuators are discussed. The principal technological forces driving microsensor development, namely lithography and planar technology, are considered, and some cautionary advice is given regarding the development of so-called smart sensors. Two issues in regard to the partitioning of measurement systems-device partitioning and calibration-are addressed. Technology constraints and packaging considerations are examined.<
Published in:
Circuits and Devices Magazine, IEEE
(Volume:6
,
Issue:
6
)
Date of Publication: Nov. 1990
- Page(s):
- 20 - 27
- ISSN :
- 8755-3996
- INSPEC Accession Number:
- 3848500
- Digital Object Identifier :
- 10.1109/101.100254
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 06 August 2002
- Issue Date :
- Nov. 1990
- Sponsored by :
- IEEE Circuits and Systems Society
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