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A repetitive pulsed power modulator, which uses high voltage static induction thyristors as main switching devices, has been designed and constructed for application to discharge light source. The main components of the power modulator are a pulse forming network (PFN) and a semiconductor switch. The PFN consists of 100 ceramic capacitors (2000 pF, 30 kV) connected in parallel. The measured impedance and output pulse width of PFN are 0.75 ohm and 427 ns, respectively. The semiconductor switch is made of 3 high voltage static induction thyristors connected in series, which is able to withstand 10 kV. The significant feature of the static induction thyristor is that it has very low ON-state voltage. This feature is especially suitable for high rep-rate operation of pulsed power modulators, since energy loss by switch can be remarkably reduced.