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KFAB DecisionSite: an interactive, exploratory yield analysis framework

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5 Author(s)
Flores, A. ; Res. & Dev. Center, Texas Instrum. Dallas, TX, USA ; Lebowitz, J. ; Pressnall, W. ; Martin, C.
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A data analysis framework has been implemented at the Texas Instruments Kilby Fabrication Center which encourages best practice decision making for yield, equipment and product engineers and managers by incorporating a continuous data flow across multiple vertically focused analytical tools and data sources. This data flow moves beyond drill down and OLAP techniques to "drill across" domains and mirror the way engineers naturally perform exploratory yield analysis. The data flow is presented to users in the form of Process Guides, which codify best practice analysis techniques by stepping the user through data access, analysis and collaboration. Rather than replacing vertical applications and data sources, each step of a given process guide adds value to existing point solutions for electrical test, defect, manufacturing execution, wafer position and process data. The architecture of the system is discussed, and examples of Process Guides are shown which illustrate the interactivity of the presentation layer and the flexibility of the framework to deliver best practice techniques for solving cross functional problems.

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Advanced Semiconductor Manufacturing 2002 IEEE/SEMI Conference and Workshop

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