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Advanced Process Control: benefits for photolithography process control

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1 Author(s)
Gould, C. ; Infineon Technol. Richmond, Sandston, VA, USA

High volume, cost effective, manufacturing of state of the art lithography processes requires in depth understanding of Process and Process-Tool interaction to achieve Advanced Process Control (APC). The APC systems being deployed at Infineon Technologies, Richmond has shown and is expected to continue demonstrating continuous improvement for the following primary metrics: · OL and CD Cpk · Rework Reduction · Reduction of MTTD · Lot Cycle Time improvement.

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Advanced Semiconductor Manufacturing 2002 IEEE/SEMI Conference and Workshop

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